5.5G玻璃基板传送机器人

产品摘要:

5.5G真空环境下双臂玻璃转移机器人， 5.5GGlass transfer robot with double arms in Vacuum condition。

产品描述

Model Name		AR-WV5.5G-350
Structure		Cylindrical Coordinate
Moving Axes		4
Operating Range	A-axis	2475mm
	B-axis	2475mm
	θ-axis	330˚
	Z-axis	350mm
Operating speed (MAX)	A-axis	2475mm/2.5sec
	B-axis	2475mm/2.5sec
	θ-axis	180˚/2.5s
	Z-axis	350mm/2s
Vacuum Seal Method		Mechanical lip-seal, Bellows-seal
Repeatability		±0.5mm
Cleanliness		Class 4
Leak rate		1 x 10^-7(Pa-m³/s)
Payload		50kg(Including the hand)
Operating Environment	Atmoshperic	Temp. : 0~40℃ Humid. : 70% under
Operating Environment	Vaccum	Vacuum level : 1 x 10^-5Pa Temp. : 0-80℃
Robot Weight		Approximately 2000Kg