韩国6.5G玻璃基板传送机器人
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产品名称:
韩国6.5G玻璃基板传送机器人型号:
WV6S价格:
400000最小起订量:
1
产品摘要:
6.5G真空中双臂玻璃转移机器人， Glass transfer robot with double arms in Vacuum。
- 产品描述
Model Name
AR-WV6S-450
Structure
Cylindrical Coordinate
Moving Axes
4
Operating Range
A-axis
2894mm
B-axis
2894mm
θ-axis
330˚
Z-axis
450mm
Operating speed (MAX)
A-axis
2894mm/2.8sec
B-axis
2894mm/2.8sec
θ-axis
185˚/2.35s
Z-axis
450mm/2s
Vacuum Seal Method
Mechanical lip-seal, Bellows-seal
Repeatability
±0.5mm
Cleanliness
Class 3
Leak rate
1 x 10-5(Pa-m3/s)
Payload
50kg(Including the hand)
Operating Environment
Atmoshperic
Temp. : 0~40℃
Humid. : 70% under
Vaccum
Vacuum level : 1 x 10-5Pa(1.0 x 10-8Torr)
Temp. : 0-80℃
Robot Weight
Approximately 1700Kg
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