韩国三星晶圆传输/搬运机器人

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产品摘要:

大气环境下单臂输送硅片机器人-Wafer transfer robot with single arm in Atmosphere condition

产品描述

Model Name		AR-S300H-300
Structure		Cylindrical Coordinate
Moving Axes		3
Operating Range (MAX)	A-axis	510mm
	θ-axis	330˚
	Z-axis	300mm
Operating speed (MAX)	A-axis	1700mm/sec
	θ-axis	470˚/s
	Z-axis	500mm/s
Repeatability		±0.1mm
Cleanliness		Class 1(0.1㎛/cf)
Payload		3kg(Including the hand)
Operating Environment		Temp. : 0~40℃ Humid. : 70% under
Robot Weight		Approximately 20kg
Appearance		Aluminium white Alumite SUS buffing(#400)